Applied Materials announces new LTPS and IGZO deposition systems

Applied Materials announced two new film deposition systems, used to make high definition televisions and high-resolution mobile device displays - both OLEDs and LCDs. First up is the AKT-PX-PECVD system (shown below) that can be used to deposit LTPS films on large glass substrates (sized from 1.6 m2 to 5.7 m2).

The second system, the AKT-PiVoT PVD system is used to deposit metal oxide-based TFTs (IGZO in particular). Applied says that this new system is capable of overcoming "mura effects" that reduce the quality of the display. It also offers "breakthrough" stability which makes is suitable for OLED displays and TVs.

Posted: Nov 02,2012 by Ron Mertens