Applied Materials launch two new PECVD OLED encapsulation deposition systems

Applied Materials announced two new PECVD based deposition systems aimed towards the flexible OLED thin-film encapsulation market.

Applied Materials PECVD chamber photo

The two new systems are the AKT-20K (925x1500 mm substrates) and the AKT-40K (1250x2200 mm substrates). Both systems offer the ability to deposit diffusion barrier films with very low water and oxygen penetration. These high-performance films are deposited at low temperatures of

Posted: Oct 13,2015 by Ron Mertens