Deposition equipment maker SolMateS developed a patented 'soft-landing' method ITO deposition, specially tailored for OLED panels. The soft-landing technique is based on SolMateS's pulsed laser deposition (PLD) process, and it enables a fully-functional ITO layer directly on the organic materials, at room temperature.
The company reports that they managed to deposit an ITO on a transparent OLED that features a transparency of 80% with similar functional specifications compared to standard OLEDs (with non-transparent Aluminum electrode).
The ITO is deposited at sputter speeds and is available on the 200mm PLD tool. The process is currently scaled to panel size and roll-to-roll.