"The flat panel display industry faces challenges similar to those of the semiconductor industry. Conventional cleaning methods, with their costly issues of toxic chemical storage, handling, consumption and disposal, pose major problems for manufacturers," said Dr. Christiane Gottschalk, Senior Manager of Sales and Customer Service for ozone products with the MKS Power and Reactive Gas Products Group. "By using ozonated water as the cleaning agent, the LIQUOZON Single system offers a clean, safe alternative with no compromise in process performance or reliability, and significant reductions in waste disposal costs. With such cost and process benefits, ozone delivery systems are gaining wide acceptance in semiconductor and flat panel applications including wet wafer cleaning, contaminant removal and surface conditioning.
Posted: Nov 02,2006 by Ron Mertens
