Applied Materials announced two new PECVD based deposition systems aimed towards the flexible OLED thin-film encapsulation market.
The two new systems are the AKT-20K (925x1500 mm substrates) and the AKT-40K (1250x2200 mm substrates). Both systems offer the ability to deposit diffusion barrier films with very low water and oxygen penetration. These high-performance films are deposited at low temperatures of
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Posted: Oct 13,2015 by Ron Mertens
